A game-changing equation during the etching of tuning forks and its verification through experiments
Yazarlar (4)
Dr. Öğr. Üyesi Kadir Can Erbaş Başkent Üniversitesi, Türkiye
Öğr. Gör. Mebrure ERDOĞAN Kastamonu Üniversitesi, Türkiye
Prof. Dr. Dilek Çökeliler Serdaroğlu Başkent Üniversitesi, Türkiye
Prof. Dr. İsmail Cengiz Koçum Başkent Üniversitesi, Türkiye
Makale Türü Özgün Makale (SSCI, AHCI, SCI, SCI-Exp dergilerinde yayınlanan tam makale)
Dergi Adı Measurement Journal of the International Measurement Confederation (Q1)
Dergi ISSN 0263-2241 Dergi Bilgileri (2024)
Dergi Tarandığı Indeksler SCI-Expanded
Makale Dili İngilizce Basım Tarihi 09-2024
Kabul Tarihi Yayınlanma Tarihi 01-09-2024
Cilt / Sayı / Sayfa 237 / 1 / – DOI 10.1016/j.measurement.2024.115135
Makale Linki https://www.sciencedirect.com/science/article/pii/S0263224124010200
UAK Araştırma Alanları
Biyomedikal Mühendisliği
Özet
Quartz tuning fork (QTF) sensors, characterized by simplicity, low cost, and high-quality factor, represent a significant subset. This study delves into the etching dynamics of QTF systems, crucial for sensor applications like quartz crystal microbalance (QCM). Both theoretical and experimental investigations into QTF etching, via methods like electro-etching for large-scale tuning forks (TF) and low-pressure radio frequency (RF) plasma treatment for QTFs, have been conducted. Surprisingly, post-etching measurements reveal a lower vibrational frequency for both large-scale TFs and QTFs compared to their bare counterparts, unlike QCM sensors. A novel formula correlating this frequency reduction to mass loss has been proposed and validated through lots of experiments. Notably, longitudinal homogeneity emerges as a pivotal factor influencing the accuracy of the proposed formula. In summary, the novel …
Anahtar Kelimeler
Frequency measurement | Mass measurement | Sensors | Tuning forks
Science Direct
BM Sürdürülebilir Kalkınma Amaçları
Atıf Sayıları
Web of Science 5
Scopus 5
Google Scholar 6
A game-changing equation during the etching of tuning forks and its verification through experiments

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