| Yazarlar |
Öğr. Gör. Sedat KURNAZ
Türkiye |
Prof. Dr. Özgür ÖZTÜRK
Türkiye |
Dr. Öğr. Üyesi Nurdane YILMAZ
Türkiye |
Doç. Dr. Osman ÇİÇEK
Kastamonu Üniversitesi, Türkiye |
| Özet |
| Parylene C is widely used as a passivation layer due to its excellent chemical inertness, electrical insulation, biocompatibility, and flexibility. But, it is a potential piezoelectric material that can be used as a flexible pressure sensor. Herein, the parylene C is synthesized via the chemical vapor deposition method. The flexible piezoelectric, piezoresistive, and capacitive pressure sensors based on parylene C are fabricated. The flexible piezoelectric pressure sensor is used for the first time. The sensing performance of these sensors is comparatively investigated, showing high sensitivities of 140 mV, 0.046 kPa {-{1}} , and 0.080 kPa {-{1}} in the low-pressure range (< 4 kPa), respectively. Furthermore, the response times (0.40, 0.37, and 0.48 s) and the relaxation times (0.21, 0.37, and 0.62 s) are achieved. This work demonstrates that parylene C, which is often used as a passivation layer, can also be used as a flexible piezoresistive and capacitive pressure sensor. It could also be a potential candidate for wearable healthcare monitoring, human-machine interfaces, and soft robotics in the low-pressure range. |
| Anahtar Kelimeler |
| Capacitive sensor,parylene C,piezoelectric sensor,piezoresistive sensor,pressure |
| Makale Türü | Özgün Makale |
| Makale Alt Türü | SSCI, AHCI, SCI, SCI-Exp dergilerinde yayımlanan tam makale |
| Dergi Adı | Institute of Electrical and Electronics Engineers (IEEE) |
| Dergi ISSN | 1530-437X |
| Dergi Tarandığı Indeksler | SCI-Expanded |
| Dergi Grubu | Q1 |
| Makale Dili | Türkçe |
| Basım Tarihi | 10-2023 |
| Cilt No | 23 |
| Doi Numarası | 10.1109/JSEN.2023.3305058 |
| Makale Linki | http://dx.doi.org/10.1109/jsen.2023.3305058 |
| Atıf Sayıları | |
| SCOPUS | 1 |
| Google Scholar | 1 |
