The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range
Yazarlar (4)
Öğr. Gör. Dr. Sedat KURNAZ Kastamonu Üniversitesi, Türkiye
Prof. Dr. Özgür ÖZTÜRK Kastamonu Üniversitesi, Türkiye
Dr. Öğr. Üyesi Nurdane YILMAZ Kastamonu Üniversitesi, Türkiye
Doç. Dr. Osman ÇİÇEK Kastamonu Üniversitesi, Türkiye
| Makale Türü | Özgün Makale (SSCI, AHCI, SCI, SCI-Exp dergilerinde yayınlanan tam makale) | ||
| Dergi Adı | IEEE Sensors Journal (Q1) | ||
| Dergi ISSN | 1530-437X Wos Dergi Scopus Dergi | ||
| Dergi Tarandığı Indeksler | SCI-Expanded | ||
| Makale Dili | Türkçe | Basım Tarihi | 10-2023 |
| Kabul Tarihi | – | Yayınlanma Tarihi | 01-10-2023 |
| Cilt / Sayı / Sayfa | 23 / 19 / 22277–22284 | DOI | 10.1109/JSEN.2023.3305058 |
| Makale Linki | http://dx.doi.org/10.1109/jsen.2023.3305058 | ||
| Özet |
| Parylene C is widely used as a passivation layer due to its excellent chemical inertness, electrical insulation, biocompatibility, and flexibility. But, it is a potential piezoelectric material that can be used as a flexible pressure sensor. Herein, the parylene C is synthesized via the chemical vapor deposition method. The flexible piezoelectric, piezoresistive, and capacitive pressure sensors based on parylene C are fabricated. The flexible piezoelectric pressure sensor is used for the first time. The sensing performance of these sensors is comparatively investigated, showing high sensitivities of 140 mV kPa , 0.046 kPa , and 0.080 kPa in the low-pressure range (< 4 kPa), respectively. Furthermore, the response times (0.40, 0.37, and 0.48 s) and the relaxation times (0.21, 0.37, and 0.62 s) are achieved. This work demonstrates that parylene C, which is often used as a passivation layer, can also be used as a flexible … |
| Anahtar Kelimeler |
| Capacitive sensor | parylene C | piezoelectric sensor | piezoresistive sensor | pressure |
BM Sürdürülebilir Kalkınma Amaçları
| Atıf Sayıları | |
| Scopus | 8 |
| Google Scholar | 7 |